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A megahertz nanomechanical resonator with room temperature quality factor over a million

Cornell Affiliated Author(s)

Author

S.S. Verbridge
H.G. Craighead
J.M. Parpia

Abstract

We demonstrate the fabrication and operation of high aspect ratio tensile stressed silicon nitride string resonators. We explore the parameter space of small cross sections, on the order of 100 nm, and long lengths up to 325 μm, demonstrating that such high aspect ratio resonators can be made with standard wet release processing using a material with internal tensile stress. Room temperature quality factors exceed one million at frequencies above 1 MHz. The utility of such high quality factor flexural resonators to probe the interaction of high frequency nanoscale devices with rarefied gases is demonstrated. © 2008 American Institute of Physics.

Date Published

Journal

Applied Physics Letters

Volume

92

Issue

1

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-38049046984&doi=10.1063%2f1.2822406&partnerID=40&md5=ecc02d7704add8f2730535fbed2ebf1c

DOI

10.1063/1.2822406

Group (Lab)

Jeevak Parpia Group

Funding Source

HR0011-06-1-0042

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