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Pressure dependent resonant frequency of micromechanical drumhead resonators

Cornell Affiliated Author(s)

Author

D.R. Southworth
H.G. Craighead
J.M. Parpia

Abstract

We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres. © 2009 American Institute of Physics.

Date Published

Journal

Applied Physics Letters

Volume

94

Issue

21

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-66549108981&doi=10.1063%2f1.3141731&partnerID=40&md5=54236e2b634db11db155ed53b2e61160

DOI

10.1063/1.3141731

Group (Lab)

Jeevak Parpia Group

Funding Source

DGE-0654193
HR0011-06-1-0042

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