Pressure dependent resonant frequency of micromechanical drumhead resonators
Abstract
We examine the relationship between squeeze film effects and resonance frequency in drum-type resonators. We find that the resonance frequency increases linearly with pressure as a result of the additional restoring force contribution from compression of gas within the drum cavity. We demonstrate trapping of the gas by squeeze film effects and geometry. The pressure sensitivity is shown to scale inversely with cavity height and sound radiation is found to be the predominant loss mechanism near and above atmospheric pressure. Drum resonators exhibit linearity and sensitivity suitable to barometry from below 10 Torr up to several atmospheres. © 2009 American Institute of Physics.
Date Published
Journal
Applied Physics Letters
Volume
94
Issue
21
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-66549108981&doi=10.1063%2f1.3141731&partnerID=40&md5=54236e2b634db11db155ed53b2e61160
DOI
10.1063/1.3141731
Research Area
Group (Lab)
Jeevak Parpia Group
Funding Source
DGE-0654193
HR0011-06-1-0042