Stress-based vapor sensing using resonant microbridges
Abstract
We demonstrate that silicon-polymer composite microbridges provide a robust means of water vapor detection at ambient pressure. Volumetric changes in the reactive polymer alter the tension in a doubly clamped structure leading to large and rapid changes in the resonance frequency. We demonstrate stress-based sensing of water vapor in ambient pressure nitrogen using doubly clamped buckled beams coated with a hygroscopic polymer. We show stress sensitivity of around 20 kPa (∼170 ppb of water vapor) and subsecond response time for coated microbridges. © 2010 American Institute of Physics.
Date Published
Journal
Applied Physics Letters
Volume
96
Issue
16
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-77951843428&doi=10.1063%2f1.3393999&partnerID=40&md5=86313c80d0d78850ad403a7c4c34988f
DOI
10.1063/1.3393999
Research Area
Group (Lab)
Jeevak Parpia Group
Funding Source
0908634
DMR-0908634
HR-00011-06-1-0042