Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles
Abstract
Interferometric imaging of normal mode dynamics in electromechanical resonators, oscillating in the rf regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended thin film structures and their equilibrium profiles are measured through all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the mode patterns of a microdrum silicon resonator are visualized, and the extracted vibration modes and equilibrium profile show good agreement with numerical estimations. © 2010 Optical Society of America.
Date Published
Journal
Optics Letters
Volume
35
Issue
15
Number of Pages
2654-2656,
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-77955209122&doi=10.1364%2fOL.35.002654&partnerID=40&md5=fd96b661e62332734cd3241af612fc75
DOI
10.1364/OL.35.002654
Research Area
Group (Lab)
Jeevak Parpia Group