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Fabrication and performance of graphene nanoelectromechanical systems

Cornell Affiliated Author(s)

Author

R.A. Barton
J. Parpia
H.G. Craighead

Abstract

As a result of the recent progress in fabricating large-area graphene sheets, graphene-based mechanical devices have become vastly easier to manufacture and now show even greater promise for a range of applications. This article reviews the progress of resonant graphene nanoelectromechanical systems and the possible applications of this technology to signal processing, sensing, and other areas. After discussing recent advances in fabrication and measurement techniques that make graphene resonators a viable technology, the article presents what is known about the performance of graphene mechanical systems. The authors also highlight unresolved questions, such as the source of the dissipation in graphene resonators, and discuss the progress made on these issues to date. The authors conclude with a discussion of important future directions for graphene research and the applications for which graphene nanomechanical devices may be well suited. © 2011 American Vacuum Society.

Date Published

Journal

Journal of Vacuum Science and Technology B

Volume

29

Issue

5

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-80053499840&doi=10.1116%2f1.3623419&partnerID=40&md5=f5760e29375590aa9329c9ce4a7181a0

DOI

10.1116/1.3623419

Group (Lab)

Jeevak Parpia Group

Funding Source

0908634
DMR-0908634

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