High-Q nanomechanics via destructive interference of elastic waves
Abstract
Mechanical dissipation poses a ubiquitous challenge to the performance of nanomechanical devices. Here we analyze the support-induced dissipation of high-stress nanomechanical resonators. We develop a model for this loss mechanism and test it on Si3N4 membranes with circular and square geometries. The measured Q values of different harmonics present a nonmonotonic behavior which is successfully explained. For azimuthal harmonics of the circular geometry we predict that destructive interference of the radiated waves leads to an exponential suppression of the clamping loss in the harmonic index. Our model can also be applied to graphene drums under high tension. © 2011 American Physical Society.
Date Published
Journal
Physical Review Letters
Volume
106
Issue
4
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-79251493357&doi=10.1103%2fPhysRevLett.106.047205&partnerID=40&md5=157a569420fe29b835a39a2e7380c108
DOI
10.1103/PhysRevLett.106.047205
Research Area
Group (Lab)
Jeevak Parpia Group
Funding Source
0908634
1001742