Skip to main content

Transfer printing of CVD graphene FETs on patterned substrates

Cornell Affiliated Author(s)

Author

T.S. Abhilash
R. De Alba
N. Zhelev
H.G. Craighead
J.M. Parpia

Abstract

We describe a simple and scalable method for the transfer of CVD graphene for the fabrication of field effect transistors. This is a dry process that uses a modified RCA-cleaning step to improve the surface quality. In contrast to conventional fabrication routes where lithographic steps are performed after the transfer, here graphene is transferred to a pre-patterned substrate. The resulting FET devices display nearly zero Dirac voltage, and the contact resistance between the graphene and metal contacts is on the order of 910 ± 340 Ω μm. This approach enables formation of conducting graphene channel lengths up to one millimeter. The resist-free transfer process provides a clean graphene surface that is promising for use in high sensitivity graphene FET biosensors. © The Royal Society of Chemistry 2015.

Date Published

Journal

Nanoscale

Volume

7

Issue

33

Number of Pages

14109-14113,

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84939166425&doi=10.1039%2fc5nr03501e&partnerID=40&md5=f82a0376274ddc0d38a828216ebe4f23

DOI

10.1039/c5nr03501e

Group (Lab)

Jeevak Parpia Group

Funding Source

DMR1202991
1120296
1202991

Download citation