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Size modulated transition in the fluid-structure interaction losses in nano mechanical beam resonators

Cornell Affiliated Author(s)

Author

S.D. Vishwakarma
A.K. Pandey
J.M. Parpia
S.S. Verbridge
H.G. Craighead
R. Pratap

Abstract

An understanding of the dominant dissipative mechanisms is crucial for the design of a high-Q doubly clamped nanobeam resonator to be operated in air. We focus on quantifying analytically the viscous losses - the squeeze film damping and drag force damping - that limit the net quality factor of a beam resonator, vibrating in its flexural fundamental mode with the surrounding fluid as air at atmospheric pressure. Specifically, drag force damping dominates at smaller beam widths and squeeze film losses dominate at larger beam widths, with no significant contribution from structural losses and acoustic radiation losses. The combined viscous losses agree well with the experimentally measured Q of the resonator over a large range of beam widths, within the limits of thin beam theory. We propose an empirical relation between the maximum quality factor and the ratio of maximum beam width to the squeeze film air gap thickness. © 2016 Author(s).

Date Published

Journal

Journal of Applied Physics

Volume

119

Issue

19

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84971301564&doi=10.1063%2f1.4950758&partnerID=40&md5=ef898a671f6977c26008137b76ca82a9

DOI

10.1063/1.4950758

Group (Lab)

Jeevak Parpia Group

Funding Source

CSIR 22(0696)/15/EMR-II

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