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Measuring Frequency Fluctuations in Nonlinear Nanomechanical Resonators

Cornell Affiliated Author(s)

Author

O. Maillet
X. Zhou
R.R. Gazizulin
R. Ilic
J.M. Parpia
O. Bourgeois
A.D. Fefferman
E. Collin

Abstract

Advances in nanomechanics within recent years have demonstrated an always expanding range of devices, from top-down structures to appealing bottom-up MoS2 and graphene membranes, used for both sensing and component-oriented applications. One of the main concerns in all of these devices is frequency noise, which ultimately limits their applicability. This issue has attracted a lot of attention recently, and the origin of this noise remains elusive to date. In this article we present a very simple technique to measure frequency noise in nonlinear mechanical devices, based on the presence of bistability. It is illustrated on silicon-nitride high-stress doubly clamped beams, in a cryogenic environment. We report on the same T/f dependence of the frequency noise power spectra as reported in the literature. But we also find unexpected damping fluctuations, amplified in the vicinity of the bifurcation points; this effect is clearly distinct from already reported nonlinear dephasing and poses a fundamental limit on the measurement of bifurcation frequencies. The technique is further applied to the measurement of frequency noise as a function of mode number, within the same device. The relative frequency noise for the fundamental flexure δf/f0 lies in the range 0.5-0.01 ppm (consistent with the literature for cryogenic MHz devices) and decreases with mode number in the range studied. The technique can be applied to any type of nanomechanical structure, enabling progress toward the understanding of intrinsic sources of noise in these devices. © Copyright 2018 American Chemical Society.

Date Published

Journal

ACS Nano

Volume

12

Issue

6

Number of Pages

5753-5760,

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85046759303&doi=10.1021%2facsnano.8b01634&partnerID=40&md5=848a17f21e097fab25398b5871da11c7

DOI

10.1021/acsnano.8b01634

Group (Lab)

Jeevak Parpia Group

Funding Source

1708341
647917
DMR 1708341

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