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A high frame rate hybrid X-ray image sensor

Cornell Affiliated Author(s)

Author

A. Ercan
M.W. Tate
Sol Gruner

Abstract

This paper describes a solid-state image sensor for high-speed X-ray imaging. The sensor is made up of a light sensitive detector layer bump-bonded to a readout integrated circuit (ROIC). The detector layer is high resistivity n-type silicon and is fully depleted in operation. The p-implanted islands are used to define pixel regions with 100-μm × 100-μm area. The detector layer contains 852 × 209 pixels indium bump-bonded to four identical CMOS ROICs. Each ROIC contains 213 × 209 pixels and is fabricated using a 0.25-μm CMOS process. The ROIC utilizes a capacitive transimpedance amplifier-type front-end coupled to a switched capacitor analog memory. This architecture allows storage of eight frames for high-speed burst imaging of up to a million frames per second, followed by a slower multiplexed readout. Details of the sensor design and operation are presented together with characterization results. © 2014 IEEE.

Date Published

Journal

IEEE Sensors Journal

Volume

15

Issue

3

Number of Pages

1523-1531,

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84919797655&doi=10.1109%2fJSEN.2014.2359153&partnerID=40&md5=f89e6c7d059bfa534062fbb65eb26e49

DOI

10.1109/JSEN.2014.2359153

Group (Lab)

Sol M. Gruner Group

Funding Source

DE-FG-02978R62443
DE-FG-0297ER14805
DEFG02-10ER46693

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