Free-standing epitaxial graphene
Abstract
We report on a method to produce free-standing graphene sheets from epitaxial graphene on silicon carbide (SiC) substrate. Doubly clamped nanomechanical resonators with lengths up to 20 μm were patterned using this technique and their resonant motion was actuated and detected optically. Resonance frequencies of the order of tens of megahertz were measured for most devices, indicating that the resonators are much stiffer than expected for beams under no tension. Raman spectroscopy suggests that the graphene is not chemically modified during the release of the devices, demonstrating that the technique is a robust means of fabricating large-area suspended graphene structures. © 2009 American Chemical Society.
Date Published
Journal
Nano Letters
Volume
9
Issue
9
Number of Pages
3100-3105,
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-70349971680&doi=10.1021%2fnl900479g&partnerID=40&md5=d5928a376f67e4c65cec85a1f867023e
DOI
10.1021/nl900479g
Research Area
Group (Lab)
Jeevak Parpia Group
Paul McEuen Group