Skip to main content

Large-scale arrays of single-layer graphene resonators

Cornell Affiliated Author(s)

Author

A.M. Van Der Zande
R.A. Barton
J.S. Alden
C.S. Ruiz-Vargas
W.S. Whitney
P.H.Q. Pham
J. Park
J.M. Parpia
H.G. Craighead
P.L. McEuen

Abstract

We fabricated large arrays of suspended, single-layer graphene membrane resonators using chemical vapor deposition (CVD) growth followed by patterning and transfer. We measure the resonators using both optical and electrical actuation and detection techniques. We find that the resonators can be modeled as flat membranes under tension, and that clamping the membranes on all sides improves agreement with our model and reduces the variation in frequency between identical resonators. The resonance frequency is tunable with both electrostatic gate voltage and temperature, and quality factors improve dramatically with cooling, reaching values up to 9000 at 10 K. These measurements show that it is possible to produce large arrays of CVD-grown graphene resonators with reproducible properties and the same excellent electrical and mechanical properties previously reported for exfoliated graphene. © 2010 American Chemical Society.

Date Published

Journal

Nano Letters

Volume

10

Issue

12

Number of Pages

4869-4873,

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-78650161614&doi=10.1021%2fnl102713c&partnerID=40&md5=de5cbab4ed951fad98728ba9dfbdf070

DOI

10.1021/nl102713c

Group (Lab)

Jeevak Parpia Group
Paul McEuen Group

Funding Source

0908634

Download citation