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High frequency MoS2 nanomechanical resonators

Cornell Affiliated Author(s)

Author

J. Lee
Z. Wang
K. He
J. Shan
P.X.-L. Feng

Abstract

Molybdenum disulfide (MoS2), a layered semiconducting material in transition metal dichalcogenides (TMDCs), as thin as a monolayer (consisting of a hexagonal plane of Mo atoms covalently bonded and sandwiched between two planes of S atoms, in a trigonal prismatic structure), has demonstrated unique properties and strong promises for emerging two-dimensional (2D) nanodevices. Here we report on the demonstration of movable and vibrating MoS2 nanodevices, where MoS2 diaphragms as thin as 6 nm (a stack of 9 monolayers) exhibit fundamental-mode nanomechanical resonances up to f 0 ∼ 60 MHz in the very high frequency (VHF) band, and frequency-quality (Q) factor products up to f0 × Q ∼ 2 × 1010Hz, all at room temperature. The experimental results from many devices with a wide range of thicknesses and lateral sizes, in combination with theoretical analysis, quantitatively elucidate the elastic transition regimes in these ultrathin MoS2 nanomechanical resonators. We further delineate a roadmap for scaling MoS2 2D resonators and transducers toward microwave frequencies. This study also opens up possibilities for new classes of vibratory devices to exploit strain- and dynamics-engineered ultrathin semiconducting 2D crystals. © 2013 American Chemical Society.

Date Published

Journal

ACS Nano

Volume

7

Issue

7

Number of Pages

6086-6091,

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84880837861&doi=10.1021%2fnn4018872&partnerID=40&md5=120350c0aa7bbed07f3b6d38332ad31e

DOI

10.1021/nn4018872

Group (Lab)

Jie Shan Group

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